Properties
Molecular Formula: C10H4ClF15O2
Molecular Weight: 448.57 g/mol
Chemical Structure: The molecule consists of a perfluorinated octyl chain substituted with a 2-chloroacrylate functional group. This combination imparts unique fluorinated properties such as high chemical stability and low surface energy.
Boiling Point: Data is limited due to the specialty nature, but perfluorinated acrylates generally exhibit high thermal stability and low volatility.
Solubility: Sparingly soluble in water; soluble in fluorinated solvents, some organic solvents like acetone, and specific photoresist-compatible resins.
Key Chemical Features:
- Perfluorooctyl group: Provides hydrophobicity, oleophobicity, and chemical resistance.
- 2-Chloroacrylate group: Allows for polymerization and crosslinking in UV-curable systems and photoresist formulations.
- Thermal and chemical stability: Resistant to acids, bases, and oxidation, making it suitable for high-performance electronic applications.
Industrial Applications
- Semiconductor Industry:
- Used as a surface-modifying monomer in advanced photoresists and anti-reflective coatings.
- Imparts low surface energy to resist layers, improving pattern resolution and reducing defects in lithography processes.
- Photoresist Industry:
- Functions as a reactive monomer for UV-curable resists.
- Enhances adhesion control and chemical resistance of patterned resists in high-precision photolithography.
- Electronic Chemicals:
- Acts as a specialty monomer in formulations requiring high fluorine content for non-wetting, chemical-resistant coatings.
- Can be incorporated into polymer matrices to produce films or layers with exceptional stability in harsh chemical environments.
Safety and Handling
- Hazard Classifications: May cause skin and eye irritation; handle with appropriate personal protective equipment (PPE).
- Storage: Store in a cool, dry, and well-ventilated area away from strong oxidizers and open flames.
- Environmental Considerations: As a perfluorinated compound, it is persistent in the environment. Waste management must comply with local regulations on fluorochemicals.
Summary
1,1,2,2-Tetrahydroperfluorooctyl 2-chloroacrylate (CAS 96383-55-0) is a specialty fluorinated monomer widely used in the semiconductor and photoresist industries. Its unique combination of a perfluorinated chain and a polymerizable acrylate group enables high-performance coatings with chemical resistance, low surface energy, and enhanced lithographic properties. It is critical in advanced electronics applications where precision, stability, and durability are required.
Product:96383-55-0, Semiconductor Photoresist, Electronic Chemicals


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