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Compound Name: 2-(2,2-Difluoro-1-oxopropoxy)-1-[(2,2-difluoro-1-oxopropoxy)methyl]ethyl 2-methyl-2-propenoate
CAS Number: 1311401-21-4
Molecular Formula: C11H14F4O5
Molecular Weight: 296.23 g/mol
Solubility: Soluble in common organic solvents (e.g., acetone, ethyl acetate)
Functional Groups: Fluorinated ester groups; α,β-unsaturated ester moiety

Properties

This compound is a fluorinated acrylate ester, characterized by the presence of highly electronegative fluorine atoms and ester linkages. Key chemical properties include:

• High chemical stability: The fluorine substituents impart resistance to thermal and oxidative degradation, making the compound stable under harsh processing conditions.
• Reactivity: The α,β-unsaturated ester moiety enables polymerization via free-radical mechanisms, allowing it to serve as a reactive monomer in specialty polymers.
• Hydrophobicity: Fluorination enhances hydrophobic and lipophobic properties, which is critical in applications requiring low surface energy or anti-wetting characteristics.
• Low dielectric constant: The fluorinated structure contributes to excellent dielectric properties, important for electronic and semiconductor applications.

Applications

Semiconductor Industry

1. • Used as a monomer or crosslinking agent in photoresist formulations.
   • Enhances the etch resistance and pattern resolution of photoresists during lithography processes.
   • Contributes to improved thermal and chemical stability of microfabricated structures.
2. Photoresist Industry
   • Incorporated into advanced chemically amplified resists (CARs).
   • Its fluorinated backbone reduces the development rate in aqueous base solutions, allowing for finer patterning at nanometer scales.
   • Supports high-precision microelectronics manufacturing, including DRAM and logic devices.
3. Electronic Chemicals
   • Functions as a specialty fluorinated monomer in polymers used for dielectric layers and low-k materials.
   • Offers resistance to moisture and chemical attack, extending device reliability in semiconductor and microelectronic assemblies.

Industrial Significance

Fluorinated acrylate esters like this compound are increasingly important as device geometries shrink and process demands increase:

• Enhanced performance in microfabrication: Its inclusion improves pattern fidelity in high-resolution photolithography.
• Chemical resilience: Provides resistance to solvents and etchants, supporting robust process windows.
• Design flexibility: Can be copolymerized with other monomers to tailor surface energy, adhesion, and dielectric properties for specific electronic applications.

Handling and Safety

• Precautionary measures: Avoid direct contact, inhalation, or release into the environment.
• Storage: Store in a cool, dry, and well-ventilated area away from strong oxidizers.
• Stability: Stable under normal storage, but polymerization inhibitors are typically added to prevent unwanted radical polymerization.

Conclusion

2-(2,2-Difluoro-1-oxopropoxy)-1-[(2,2-difluoro-1-oxopropoxy)methyl]ethyl 2-methyl-2-propenoate (CAS 1311401-21-4) is a high-performance fluorinated acrylate ester with essential applications in the semiconductor and photoresist industries. Its combination of fluorine-induced chemical stability, polymerizable ester functionality, and dielectric advantages makes it a key material for advanced electronic manufacturing and specialized chemical processes.

Product:1311401-21-4, Semiconductor Photoresist, Electronic Chemicals